Fabrication and characterization of high-uniformity and high-accuracy two-dimensional photonic-crystal slab waveguides on GaAs membranes involving InAs quantum dots

We have successfully fabricated several ultra-small photonic-crystal (PC)-waveguide-based components utilizing single-line-defect in the air-bridge type GaAs PC involving InAs quantum dots. By controlling the Al content of a sacrificial AlGaAs clad layer and the wet etching duration, a PC core layer with a very smooth surface was obtained. An extremely low propagation loss of 0.76 dB/mm was achieved for a GaAs core PC waveguide.