Measurement technique of in-plane motion for MEMS based on block matching

In order to measure motion characteristics and dynamic parameters of a MEMS resonator at every moment, by using stroboscopic imaging techniques, clear motion images for every moment in one cycle are obtained. Using the technique of block matching to process motion images of a MEMS resonator, the dynamic parameters are obtained. The results give important reference to MEMS design. Experimental results indicate that the repeatability of measurement is 40 nm.