Silicon-based MEMS process and standardization

This paper, reviewing the development history of MEMS technology, summarizes the developing trend of current MEMS fabrication techniques. To realize the miniaturization and 3D fabrication of MEMS device, multi-layer techniques, SOI techniques and integration are the main developing directions of current MEMS. Standardization is an important tool of MEMS research and the standardization process covers two platforms: the soft platform and the hard platform, which will exert relatively large driving forces to MEMS device research.