Study of a novel PZT thin films based micromachined ultrasonic transducer for distance measurement

Piezoelectric micromachined ultrasonic transducers (pMUTs) based on PZT-coated membrane structures have been fabricated, packaged and tested. Performance prediction for the resonance frequency is given. Mechanical quality factor, voltage response and directional polar response for the devices have been tested. Due to their small size and low cost, these pMUTs are extraordinary promising in distance measurement, especially used for many miniature measurement systems.