Comparative modelling for vibration scavengers [MEMS energy scavengers]

Conversion of the mechanical energy stored in vibrations into useful electrical energy is possible using three principles: electromagnetic, electrostatic and piezoelectric conversion. In order to build the appropriate device for a given application, a unifying model is proposed for these three principles. A methodology for comparison is presented based on this model in order to match the generator type to the input specifications (frequency, amplitude) and to the requirements at the electrical output, such as load impedance and voltage.