Dendritic platinum aggregates produced in the plasma assisted chemical vapor deposition of tin oxide thin films

The formation of platinum fractal-like structures obtained by the decomposition of platinum acetylacetonate entrapped in the plasma assisted chemical vapor deposition (PACVD) of tin oxide thin films is shown. The platinum aggregates, thus formed, show a dendritic structure of fractal dimension D/spl ap/1.1-1.6, depending on the experimental conditions.