Low-loss planar optical waveguides fabricated in SIMOX material

Planar optical waveguides have been formed in SIMOX structures, and the effect of the thickness of the buried oxide layer on propagation loss hs been studied. Waveguides with a guiding layer thickness of approximately 6 mu m have been measured, and the lowest loss, which is on the order of that of pure silicon, was observed for a buried oxide thickness of 0.4 mu m, at a measurement wavelength of 1.523 mu m.<
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