Reconfigurable RF systems based on tunable MEMS inductors

In this paper, we report the design and fabrication of reconligurable RF systems based on tunable MEMS inductors, suitable for the future wideband RF communicatlon systems. mnable inductors, and capacitors, are used to design a simple phase shifter structure or a tunable impedance. The tunable induetors, having continuous variations, are designed by controlling the magnetic coupling coefficient between circuits through electro-mechanical displacements, using electrostatic actuation.