Metal nanocrystal memory with high-/spl kappa/ tunneling barrier for improved data retention

A nonvolatile memory (NVM) with metal nanocrystal (NC) embedded in high-/spl kappa/ dielectrics is proposed. With the larger work function of the metal NC compared to that of silicon NC, the metal NC memory exhibits the better data retention characteristic. The theoretical analysis showing the effect of the electron barrier height on tunneling current density is also presented to support the importance of work function engineering of the NC in NVM structure. The other electrical characteristics such as the programming transient and data endurance are also studied and described in this paper.