MEMS optimization using genetic algorithms

Using genetic algorithms, an original method for MEMS optimization is proposed in This work. The optimized MEMS device should provide both minimum switching time and minimum equivalent capacitance, so the highest operating frequency is obtained. By analyzing the results obtained on the switching time for different operating voltage and geometrical configurations, it is important to mention that by using GA, the MEMS behavior is in good agreement with the expected results obtained by classical means.