Patch antenna on micromachined silicon

A rectangular microstrip patch antenna, realized as a silicon based monolithic millimeter-wave integrated circuit (SIMMWIC), is presented. The antenna was designed for an operating frequency of 122 GHz and manufactured on micromachined high resistivity silicon-on-insulator (SOI) substrate. Since direct measurements of the far field pattern of an integrated antenna element are difficult at this frequency, a scaled version of the antenna (with a resonant frequency of about 9.6 GHz) was also manufactured. Far field measurements were performed, to determine the antenna performance and compare with numerical results.