Carbon nanotube-based membranes: a platform for studying nanofluidics

A membrane of multiwalled carbon nanotubes embedded in a silicon nitride matrix was fabricated for use in studying fluid mechanics on the nanometer scale. Characterization by fluorescent tracer diffusion and scanning electron microscopy suggests that the membrane is void-free near the silicon substrate on which it rests, implying that the hollow core of the nanotube is the only conduction path for molecular transport. Nitrogen flow measurements of a nanoporous silicon nitride membrane, fabricated by sacrificial removal of carbon, give a flow rate of 0.086 cc/sec. Calculations of water flow across a nanotube membrane give a rate of 2.1/spl times/10/sup -6/ cc/sec (0.12 /spl mu/L/min).