Light emission at 1530 nm from mixture of Er/sub 2/O/sub 3/ and P/sub 2/O/sub 5/ nanoparticles on silicon

We introduce a new manufacturing technique that lays a light emitting layer on silicon wafer. This layer is formed with the mixture of Er/sub 2/O/sub 3/ nanoparticles and spin-on glass. It emits 1530 nm light because Er/sub 2/O/sub 3/ releases Er/sup 3+/ at high temperature. The process is simple. We also add P/sub 2/O/sub 5/, Al and Ag nanoparticles to improve the light emission.