Fabrication of SiO/sub 2/ microlenses on silicone rubber using a vacuum-ultraviolet F/sub 2/ laser

SiO/sub 2/ microlenses are fabricated on a silicone rubber surface. The silicone surface irradiated by an F/sub 2/ laser beam swells and is modified to SiO/sub 2/ by means of photochemical reaction. When the surface is irradiated by 6000-12000 shot laser pulses, it becomes smooth and spherical. By altering the number of pulses, it is possible to alter the microlenses' focal lengths within the range of 120-170 /spl mu/m.