VCSEL array module using (111) facet mirrors of a V-grooved silicon optical bench and angled fibers

We propose an advanced scheme of optical subassembly (OSA) using a silicon optical bench (SiOB) for the vertical-cavity surface-emitting laser (VCSEL) array. The VCSEL beams were deflected on the (111) end facets of the V-grooves in a SiOB and were coupled into the angled fibers. The inclined angle and position of the fibers were designed to maximize the coupling efficiency. The fabricated OSA showed a coupling efficiency of 30%-50% and a large misalignment tolerance of about 90 μm along the longitudinal direction of the V-grooves. Data transmission of 2.5 Gb/s ×12 channels was demonstrated with clear eye diagrams.