Optimization and test of a calorimetric silicon flow sensor

In this paper, the influence of the geometry design on the output of the sensor is given. The sensitivity and the range of the flow velocity are two key features for the calorimetric sensor considered here. An optimized geometry of the flow sensor is obtained in this paper. Lastly, a sensor is fabricated using the optimum geometry and the experimental results are compared to the simulation results. A good agreement between them is achieved.