A new method to compute registration error from DFM type test structures

A new method to compute registration error from the slanted die-fit-monitor (DFM)-type test structures using an on-line calibration curve has been presented. The method is suitable for use in Keithley 350, parametric measurement systems for estimation of registration error during measurement where available computing power is limited. The results obtained from this method are compared with the registration errors calculated from the standard DFM structure.<
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