Development of electron optical instrument for evaluation of multi emitters: real time observation of operating conditions of multi emitters by LEEM, PEEM and FEEM

An electron optical instrument for evaluation of emission characteristics of multi emitters is developed to perform the following functions: (1) observation and recording of dynamical behaviors of emission patterns from the whole multi emitter unit as well as each individual working emitter; (2) image observation of geometrical shapes of individual emitters and gates; (3) measurement of emission current stability from the whole multi emitter unit as well as each individual working emitter. A field emitter array type of multi emitter is used as a specimen. The instrument is found to have the capability of real time and simultaneous observation of LEEM and FEEM images as well as PEEM and FEEM images.