Micro-automating semiconductor fabrication

Progress in automating very-small-scale mechanical processes is reviewed. The special requirements of microautomation are identified, and three applications are examined. They are positioning, electrical probing, and mechanical probing. The architecture and design of a microautomation system are described. Microsensors and microactuators are discussed. The use of magnetics technology for driving the microautomation system is reported, and a precision workspace for demonstrating a microautomation system is described. Also described are a coarse/fine positioner and a linear transport path capable of moving the fine manipulator from one precision-demanding area to another.<
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