RF MEMS waveguide switch

In this paper, a unique concept for RF MEMS waveguide switches is introduced. The proposed structure employs a ridge waveguide integrated with MEMS actuators. The switch combines the advantages of MEMS technology with the high power handling capability of waveguide technology. It also promises to be useful in high frequency applications 100-200 GHz. In order to demonstrate the concept, a Ku-band waveguide switch employing a thermally plastic deformable MEMS actuators has been fabricated and tested. The achievable measured results are very encouraging, demonstrating the potential of such novel type of MEMS switches.