Reconfigurable RF circuits based on integrated MEMS switches

MEMS phase shifters, based on switchable passive components, are used to achieve a variety of circuits with low insertion loss, wide bandwidth and compact die size. Integration of MEMS switches with active GaAs pHEMT MMICs achieves reconfigurable LNA and PA devices. A 4 b true time-delay phase-shifter achieves /spl les/1.2 dB insertion loss on a 7 mm/sup 2/ die.