Fabrication and analysis of new MEMS IF filters

Currently, the global interest in the wireless communication field demands the integration of RF transceivers on a single silicon chip. Filters have a major role in the construction of high performance transceivers. Bandpass filters are one of the most important elements in frequency selective circuits. This paper introduces new cantilever beam resonators and the novel V shape coupling element which is used to couple two double clamped resonators together These elements are used to design new MEMS bandpass filters operating in intermediate frequency (IF) range, from 1 MHz to 50 MHz.