Leakage behavior of DC electrically degraded (Ba,Sr)TiO/sub 3/ thin films

The phenomena of dc electrical degradation of (Ba/sub 0.5/Sr/sub 0.5/)TiO/sub 3/ thin films was studied. From our experimental and analytical results of current versus voltage (I-V) characteristics, it was shown that the degraded devices exhibited analogous leakage behaviors with the devices which have thin intercalated (Ba/sub 0.5/Sr/sub 0.5/)TiO/sub 3/ layers with intentionally introduced oxygen vacancies between cathodes and thick (Ba/sub 0.5/Sr/sub 0.5/)TiO/sub 3/ layers without intentionally introduced oxygen vacancies. This could be explained by assuming that oxygen vacancies accumulate at the interfaces between the cathodes and the (Ba/sub 0.5/Sr/sub 0.5/)TiO/sub 3/ films after fatigue.