A bubble-jet MEMS printhead integrated with CMOS de-multiplexer

This paper describes the work aimed to develop a thermal inkjet (TIJ) printhead by using bulk micromachining technology (MEMS). This experiment develops new structure designs of chip for inkjet printheads. A thermal inkjet device is designed, several of the dimensions may be adjusted just a few microns to change or optimize the drop generation performance. This energy conversion devices and systems based on integrated driver head with the performance of high-frequency and picoliter drop Inkjet and structures. A smart CMOS circuit including D Flip-Flops signal-processing along with bi-directional data transfer and 12 V power amplifiers in a printhead chip. All of the jets of the printhead are controlled by very few input lines: a pulse shape (ENABLE), a data line (DATA), a bit shift clock (BIT SHIFT), a clearing pulse, 5-volt supply for the logic devices, a higher voltage for energizing the heater resisters, and a ground line. The fabricated back side etching thermal inkjet (TIJ) printhead is measured by open pool and close pool system. The measured begin voltage is 6.5 V, life time is 9/spl times/107.