Al/sub 0.10/Ga/sub 0.90/As-GaAs microcoolers

GaAs-based microcoolers were fabricated and tested. An Al/sub 0.10/Ga/sub 0.90/As layer grown on GaAs, having a lower thermal conductivity and comparable electrical conductivity to that of the substrate, was employed in the microcooler structure to reduce the heat conduction back from the heat sink. Maximum cooling temperatures of 0.87 /spl deg/C and 2.3 /spl deg/C were obtained at ambient temperatures of 25 /spl deg/C and 100 /spl deg/C, respectively, from 60 × 60 μm microcoolers.