Micro patterning of fluorescent nanoparticles by atomizers combined with electrostatic deposition and stencil mask

As a method to fabricate micro pattern of nanoparticles, this paper presents a new method based on atomizers combined with electrostatic deposition and stencil mask. The system consists of an atomizer, a stencil mask, and electrostatic field generator for collecting particles. Electrospray and SAW atomizer were utilized as atomizers and SiN stencil mask was fabricated. 2 /spl mu/m patterning was possible. The research showed the possibility of nano patterning.