Analysis, and optimization of a CMOS vertical thermal actuator

An Electro-thermally and vertically driven MEMS actuator is analytically and practically examined which is based on the asymmetrical thermal expansion of the microstructure with the different shape of its beam. Analytical results are presented and compared with results obtained from finite element modeling (FEM). In previous work we introduced the use of such thermal actuator in micropositioning application to drive a variable capacitor as a part of an RF circuit. In this paper, issues related to the optimal design of the microstructure of the actuator are presented with its effect on the performance of the system, which lead to an improved design.