Self-aligning MEMS in-line separable electrical connector

A MEMS in-line separable connector containing features for precision self-alignment is demonstrated. The concept relies on sliding connection between female and male halves to induce vertical deflections of a set of flexible conductors and establish stable electrical contacts. Electrodeposited photoresist is used to fabricate thick, nonplanar conductors, shaped by a silicon substrate that has previously been terraced by anisotropic etching. Further etched features ensure transverse and vertical self-alignment between conductor elements during mating. Prototype 10-way connectors are demonstrated with 200 /spl mu/m wide conductors on a 250-/spl mu/m pitch. Mechanical reliability of contacts during repeated mating and demating is demonstrated, and initial measurement of contact resistance reveals an encouraging value of 30 m/spl Omega/.