Static noise margin of the full DG-CMOS SRAM cell using bulk FinFETs (Omega MOSFETs)

The operational six-transistor SRAM cell was experimentally demonstrated using bulk FinFET CMOS technology. A cell size of 0.79 /spl mu/m/sup 2/ was achieved by 90 nm node technology, with stable operation at 1.2 V using 4 levels of W and Al interconnects. Static noise margin of 280 mV was obtained at V/sub cc/ of 1.2 V. To our knowledge, this represents the first experimental demonstration of a fully integrated bulk FinFET SRAM cell.