Use of plasma treatment in the sol-gel process of ferroelectric (Bi,La )/sub 4/Ti/sub 3/O/sub 12/ thin films for crystalline orientation control

In this paper, we report a novel method and demonstrate that the crystalline orientation of ferroelectric Bi/sub 3.35/La/sub 0.75/Ti/sub 3/O/sub 12/ (BLT) thin films is drastically changed by the plasma treatment before the crystallization annealing during the sol-gel fabrication process.