Study of nanoscale structure of near-field emission of semiconductor laser

Results of studying a thin near-field structure of the semiconductor laser emission using the scanning near-field optical microscopy (SNOM) are presented. Significant enhancement of the resolution has been achieved by the deconvolution of obtained 2D images using Tikhonov's method. This has enabled the detection of the true nanoscale structure of inhomogeneities in a semiconductor laser emission.