Characterization of the thin oxides degradation through Fowler-Nordheim current

The paper makes a survey of tunnel oxide constant-current stress measurement method as a basis to characterize the oxide capability to sustain a large number (>10/sup 6/) positive and negative current pulses operating at high temperature. The time-dependent-dielectric-breakdown (TDDB) method appears to be a complete rapid and accurate oxide characterization if some precautions are taken.