Temperature dependent emissivity metrology development at NIST in support of RTP needs

Measurement instrumentation and methodology for temperature dependent emissivity of solid materials are under development in NIST's Fourier Transform Spectrophotometry Laboratory. The effort is directed to support US industrial needs for emissivity data and standards for a broad range of applications including rapid thermal processing (RTP). The measurement approach and instrumentation design for several systems under construction are described. In particular, a vacuum goniometer for reflectance and transmittance measurement has been designed for the characterization of the emissivity of RTP samples.