Silicon single crystal on quartz: fabrication and benefits

In this paper, we present a process based on the well known Smart-Cut technology developed by SOITEC to build a hetero-substrate that benefits from the optical transparency of the substrate and the electrical properties of the active layer. This heterostructure consists in a thin monocrystalline Si layer transferred on a fused silica substrate and is usually called SOQ (Silicon on Quartz). Our SOQ wafer is compatible with high temperature processes and can find applications in various fields such as displays, imagers and RF devices.