Polymeric optical interconnection on OEIC chips for future 100-Gbit/s class O/E packages

We propose a monolithically-integrated polymeric optical waveguide with a micro-mirror that makes it significantly easier to construct photoreceiver modules. It is possible to shrink the spot-size of the incident beam by curving the mirror, which yields much lower insertion loss compared to flat mirrors. The location and shape of the mirror can be easily controlled by common photolithographic techniques. Using a prototype waveguide, the total insertion loss for the interconnect of a single-mode fiber (SMF) to a 9-/spl mu/m (23-/spl mu/m) diameter PD was reduced to 3.8 (1.6) dB.