A 750MHz 144Mb cache DRAM LSI with speed scalable design and programmable at-speed function-array BIST

A 750MHz 144Mb cache DRAM LSI incorporates speed-scalable embedded DRAM and SRAM macros, and is realized using a logic-merged DRAM process. The LSI has a built-in at-speed test engine with programmable test pattern and timing, merging logic and memory test. The die area is 285mm/sup 2/ in a 0.18/spl mu/m 6M logic-merged DRAM process.