Micro-sized spectrometer based on a lamellar grating interferometer

A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 /spl mu/m. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm. A preliminary measurement with a xenon arc lamp is shown.