Low-loss 1 /spl times/ 2 MEMS optical switch with three degrees-of-freedom actuation

A low-loss 1 /spl times/ 2 MEMS optical switch with novel three-degrees-of-freedom actuator is demonstrated. The actuator can achieve in-plane, out-of-plane, and rotational motion. Therefore, low-loss switching performance can be obtained through these flexible fine adjustments. 0.6 dB insertion loss with long-term repeatability as low as /spl plusmn/0.04 dB is demonstrated for over one million cycles, and switching speed as fast as 0.8 ms is achieved with 5-V drive.