Magnet arrays for use in a 3-D MEMS mirror array for optical switching

Magnet arrays for creating regions of high magnetic flux gradient are presented. These high-flux gradient regions are useful for actuation of two-axis micromirrors with quadrupole coils, which are an essential component of some optical switches. Three magnet arrays are presented: a checkerboard array made of individual magnets and two monolithic magnet arrays, an array with filled holes, and an array with raised nubs. Monolithic magnet arrays reduce costs and eliminate the runout introduced from fabrication tolerances of the checkerboard array. Elimination of runout allows the mirrors to be precisely centered over the high-gradient regions. Quadrupole mirror arrays were fabricated and showed performance of 7/spl deg//mA for a monolithic magnet with an array of steel-filled holes.