Development of a robust 50V 0.35 /spl mu/m based Smart Power Technology using trench isolation

This paper describes a new 0.35 /spl mu/m CMOS based smart power technology. The so-called I3T50 technology belongs to a series of intelligent interface technologies developed within AMI Semiconductor over the past years. This technology is suitable for applications up to 50 V, such as automotive, peripheral and consumer applications. Trench isolation is used to isolate the devices, substantially reducing the isolation area. The set of devices available within this technology consists of n-type and p-type CMOS and DMOS devices, bipolar transistors, a high voltage floating diode, passive components, OTP memory and a set of ESD protection structures. In the future, the technology will be extended also with a modular embedded flash memory.