Crosstalk isolation of monopole integrated antenna on Si for ULSI wireless interconnect

Crosstalks on local interconnect metal lines at high frequency have been evaluated for wireless interconnect on Si using monopole integrated antenna. For an antenna of length 3 mm, the maximum value of crosstalk on a victim line of same length and separated by a distance of 10 /spl mu/m was found to be -18 dB at 9 GHz. Large reduction in crosstalk is possible by operating the antenna slightly off the resonance point.