YBCO mid-infrared bolometer arrays

A 2/spl times/2 array of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// (YBaCuO) transition edge bolometers has been fabricated on an MgO substrate. The bolometers are of the meander type with line width and line spacing of 40 /spl mu/m. The meander length of a single bolometer is 12.5 mm, covering an area of 1 mm/spl times/1 mm. The voltage responsivity of each pixel, at 10 /spl mu/m wavelength, has been studied as a function of modulation frequency. The array exhibits a uniform response and an electrical noise equivalent power (NEP) of 4.2 /spl times/10/sup -12/ W//spl radic/Hz or an optical NEP of 1 /spl times/10/sup -9/ W//spl radic/Hz. Thermal crosstalk between adjacent pixels has been also studied and first imaging results are presented.