A displacement-to-voltage converter circuit using a switched-capacitor technique

A technique for precise measurement of changes in displacement of capacitor gap is presented. In order to obtain a linear relationship between the output voltage and changes in capacitor gap over a wide dynamic range, a novel switched-capacitor circuit has been applied. This circuit has been implemented in 0.8 /spl mu/m CMOS process. Results showed that the theoretical values match that of measurement results with accuracy up to 1%.