The electrical properties of oxides-added thick-film resistors on aluminum nitride substrates

Aluminum nitride, which has better thermal conductivity and the thermal expansion coefficient close to that of silicon, is very suitable for ceramic substrates. However, the commercial thick film resistor pastes are incompatible with AlN substrates. To solve the problem of the incompatibility between the aluminium nitride substrates and commercial thick film resistor paste, various kinds of oxides were added into commercial resistor pastes to improve the electrical characteristics of thick film resistors. The oxides-added resistor pastes were then printed on the aluminum nitride substrates, and the electrical properties of the resistors were investigated.