Nanoimprint lithography-A key "engine" to nanotechnology research and commercialization today

Summary form only given. Nanoimprint lithography (NIL) has increasingly been recognized as a key nanomanufacturing technology that will play a critical role in commercialization of nanostructures. In this talk, we will overview the development of NIL technologies (machines, masks, resists, and processes) and applications in the NanoStructure Laboratory at Princeton University.