Dynamic calibration of low-range silicon pressure sensors

Two methods of dynamic calibration of low-pressure piezoresistive sensors are presented and related to each other. The first method consists of the generation of standing waves in a tube of the length corresponding to the wave frequency. The change of the wave frequency allows one to obtain (step by step) the whole frequency response of the sensor. The second method consists of the recording of the down-step time response of the sensor. The main difficulty of the second method lies in obtaining the proper shape of the pressure drop. It has been found that the inlet tube length is essential in obtaining successful results. Comparison of both methods shows satisfactory agreement of the calibration results.