Plasma Anodized Lanthanum Titanate Films

This paper discusses the application of plasma anodization to the pyrochlore, lanthanum titanate (La
2
Ti
2
O
7
), and the use of this material as a thin film dielectric. The process involves co-evaporation of the metals, lanthanum and titanium, followed by plasma anodization. Evaporation and anodization techniques are fully discussed as are the electrical properties of the resulting films.