Thin Films of Titanium and Titanium Oxide for Microminiaturization

Experimental results on the electrical properties of thin-film resistors, thin-film capacitors and thin-film diodes made of titanium/ titanium oxide/metal layers are described. The conduction phenomena in the three-layer titanium/ titanium oxide/metal structure are explained on the basis of a p-n Junction and p-i-n junction within the anodically formed oxide films.