Fabrication and evaluation of submicron-square Si wire waveguides with spot size converters

A schematic drawing of Si wire waveguide is shown. We aim at making the Si waveguide with a 300-nm-square section in order to remove the polarization dependence. The spot size converter consists of the tapered Si wire waveguide with a tip width of 60 nm and the 3x3 /spl mu/m-square polymer waveguide.