Self-assembled nanoholes, lateral quantum-dot molecules, and rolled-up nanotubes

We present a detailed investigation of novel strain-driven semiconductor nanostructures. Our examinations include self-assembled nanoholes, lateral quantum-dot (QD) molecules, and rolled-up nanotubes. We overgrow InAs QDs with GaAs and apply atomically precise in situ etching to fabricate homogeneous arrays of nanometer-sized holes with diameters of 40 to 60 nm and depths up to 6.2 nm. The structural properties of the nanoholes can be precisely tuned by changing the QD capping thickness and the in situ etching time. We show that strain fields surrounding the buried quantum dots drive the nanohole formation process. We overgrow the nanoholes with 0.2- to 2.5-ML InAs and observe the formation of compact lateral InAs QD molecules. The number of QDs involved in a lateral QD molecule can be tuned from two to six by changing the growth temperature. Our systematic photoluminescence study documents the QD molecule formation process step by step and helps to interpret our structural results. We also present the fabrication of laterally aligned lateral QD bimolecules by growing InGaAs on a GaAs [001] substrate patterned with a square array of nanometer sized holes. Charge carriers in such bimolecules might serve as quantum gates in a future semiconductor based quantum computer. Furthermore, we release strained semiconductor bilayers from their surface to fabricate individual rolled-up semiconductor micro- and nanotubes. We control the diameter of strain-driven In(Ga)As-GaAs tubes from the nanometer to micrometer range by simply changing the layer thicknesses and built-in strain. We propose to roll in metal strip lines to fabricate nanocoils and nanotransformers. To support our proposition, we fabricate homogeneous single and twin GaInP tubes. We present a straight GaInP microtube of more than 2 mm in length and a length-to-diameter ratio of about 2000, thus, elucidating the great potential of this technology.